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JPE CBS 低温无磁真空位移台
    发布时间: 2024-04-30 09:21    

CBS是用于在低温全方位应用的线性真空位移台。使用非磁性材料制造，因此允许在高磁场中运行。它配备了高性能全陶瓷直线滚柱导轨，以实现最大的刚度和机械稳定性。导轨预加载弹簧，确保性能始终如一，从环境温度到低温运行时都可以平稳运行。

  • 弹簧预紧滚柱导轨，全陶瓷

  • 水平和垂直运动

  • xy 均可配置

  • 电阻反馈传感器选项 -RLS

  • 大行程紧凑而坚固的设计

  • 非磁性

  • 集成小行程扫描功能

  • 20 mK 至 375K 可用，且真空兼容

  • 材质：钛、青铜、陶瓷

参数：

specsunitCBS10CBS10-RLSCBS5CBS5-RLS
SYSTEM SPECIFICATIONS
Active axes-1
Type of motion-Linear, any orientation
Step/scan actuator *-Piezo ceramic
Step rangemm105,5
Speed @ ambientmm/s33
Speed @ 4Kmm/s11
Min. step size @ ambientnm150150
Min. step size @ 4Knm5050
Scan Range @ ambient**µm1010
Scan Range @ 4K **µm22
Scanner sensitivity @ ambientnm/V6666
Scanner sensitivity @ 4Knm/V1313
Driving force @ ambientN22
Driving force @ 4KN11
Payload for horizontal motiongrams1000500
Payload for vertical motiongrams6050
Mechanical endstops-at begin and end of range
Operating temperatureK0.02-375
Main construction material-Titanium, bronze, ceramic
Massgrams30331920
DRIVE ELECTRONICS
Controller/driver-CAB-230(115), CADM2
Sensor readout-N/ARSMN/ARSM
* Step/scan positioning is both done with the CADM2, not simultaneously
** CADM2 -20 to +130V, 10 bits resolution, setpoint rate approx. 10Hz